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FP64 Plasma Treatment System
FP64 systems are specifically configured to meet flex panel production requirements. Daily operating expenses, such as the process gases and power consumption, are minimized through unique design concepts. The FP64 system is a cost and space efficient plasma system for inner layer processes and flexible panel formats.
The FP64 platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz power supply are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.
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FP64 Data Sheet
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>