Applications > Semiconductor > Solar Cell and Photovoltaic (PV) Device Manufacturing
Solar Cell and Photovoltaic (PV) Device Manufacturing
As the market for “green” sources of energy grows, manufacturers of solar cells and photovoltaic devices around the world are rapidly increasing production in order to capitalize on this emerging trend. As with other semiconductor-based devices, plasma processing is used for both device manufacturing and device packaging applications.
Typical applications include wafer edge etching, wafer cleaning; metal oxide removal; organic and inorganic contamination removal; etching of thin film layers such as silicon nitride, silicon oxide, benzocylcobutene (BCB), polymers and polyimide; photoresist (PR) etching, ashing and descum; wafer surface roughening to improve bondability; wafer surface activation to increase wettability, and improve the uniformity of liquid flow over the surface of the wafer.
March’s plasma systems for solar cell and photovoltaic (PV) device manufacturing and packaging are designed to provide highly repeatable results with excellent etch rates and uniformity (both within wafer and wafer-to-wafer). Our systems are also capable of handling multiple wafer sizes (including 4, 6, 8 and 12 inch wafers, as well as square and other non-round substrates), and are capable of high-throughput automated processing.
Options include SECS/GEM factory automation software. Our advanced plasma systems are highly configurable in order to meet your demanding production requirements.
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Semiconductor Applications Team
Scott Szymanski, Semiconductor Market Manager
Mr. Szymanski works to expand strategic alliances, strengthen partnerships with equipment suppliers, and develop future product offerings tailored to the semiconductor market. With 10+ years of experience at major semiconductor companies, he holds a B.S. degree in Mechanical Engineering from UCLA, and an M.B.A. from the University of Phoenix.
Peter Huang, Semiconductor Applications Engineer
Mr. Huang joined March Plasma Systems in 2006. Prior to his appointment at March he has held a variety of positions in L3 Communications, Raytheon and Texas Instruments. Huang has a BS from Chung Yuan University in Taiwan and a MS from the University of Houston.
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