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Leading Plasma Innovations

The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors.

Applications > Semiconductor > Encapsulation and Mold

Encapsulation and Mold

Organic-based substrates, like those used in BGA packages, and metal leadframes are susceptible to delamination. Delamination is caused by poor adhesion of the encapsulant compound to the multiple interfaces on the substrate package including solder mask, the die top passivation, and the substrate metallization.  Peel tests and C-mode scanning acoustic microscopy (C-SAM) have proven that delamination issues are significantly reduced when packages are plasma treated prior to molding. Plasma processing greatly improves adhesion of mold compounds by increasing the substrate surface energy and results in increased package reliability.

The figure below displays the effect of plasma on adhesion of mold compound to differing solder mask formulations.  In general with increasing plasma exposure the adhesion level increases.


The figures below display the adhesion enhancement with plasma.  Note that the failure mode for the plasma treated sample results in cohesive failure of the substrate as opposed to adhesive failure in the non-treated substrate.

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Without plasma treatment 

 

With plasma treatment 

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More Applications

Plasma treatment is also used for other microelectronic applications including wafer cleaning prior to wafer dice, surface activation prior to package marking, improvement in solder wetting, and to enhance the conformal coating process. In conformal coating applications the encapsulating resin may not completely wet the substrate surface resulting in coating voids and delamination. Plasma ensures that the fluid completely wets the numerous materials on the PCB and enhances the coating adhesion.

Related Technical Papers:

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Related Products:

AP-1000 Plasma Treatment System

AP-1000 Plasma Treatment System

PLC controller with touch screen interface provides industrial reliability and ease of use. Complete system enclosure minimizes footprint.

FlexTRAK™ Plasma Treatment System

FlexTRAK™ Plasma Treatment System

The FlexTRAK system offers high-throughput capability of up to 480 substrates or process carriers per hour. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its unique slim structure minimizes floor space requirements.

FlexTRAK-BH™ Plasm Treatment System

FlexTRAK-BH™ Plasma Treatment System

The FlexTRAK-BH system is designed for
high-throughput processing of microelectronic boats, trays, or other
flat device carriers, up to 2 boats per plasma cycle.

FlexTRAK-SH™ Plasm Treatment System

FlexTRAK-SH™ Plasma Treatment System

The universal architecture of the FlexTRAK-SH system accommodates a wide range of strip sizes in the same system, yielding unmatched production flexibility.

FlexTRAK-WR Plasm Treatment System

FlexTRAK-WR™ Plasma Treatment System

The FlexTRAK-WR plasma treatment system is designed for
high-throughput processing of semiconductor wafers up to
300mm (12 in.).

FlexTRAK Plasm Treatment System

XTRAK Plasma Treatment System

With process capability of up to 180 substrates or carriers per hour, the system's Smart Tune™ management system provides closed-loop control that reduces tuning to less than one second.

PX-Series Plasma Treatment System

PX-Series Plasma Treatment System

PX-Series systems are equipped with an automatic impedance matching network for ease of operation and consistent results.

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Semiconductor Applications Team

Scott Szymanski

Scott Szymanski, Semiconductor Market Manager

Mr. Szymanski works to expand strategic alliances, strengthen partnerships with equipment suppliers, and develop future product offerings tailored to the semiconductor market. With 10+ years of experience at major semiconductor companies, he holds a B.S. degree in Mechanical Engineering from UCLA, and an M.B.A. from the University of Phoenix.

 

Peter Huang

Peter Huang, Semiconductor Applications Engineer

Mr. Huang joined March Plasma Systems in 2006. Prior to his appointment at March he has held a variety of positions in L3 Communications, Raytheon and Texas Instruments. Huang has a BS from Chung Yuan University in Taiwan and a MS from the University of Houston.

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Semiconductor

Semiconductor Advanced Packaging

The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>

Medical Device

Life Sciences

The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board

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Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>

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