Products > Semiconductor > FlexTRAK-BH™ Plasma Treatment System
FlexTRAK-BH™ Plasma Treatment System
The FlexTRAK-BH system is designed for high-throughput processing of microelectronic boats, trays, or other flat device carriers, up to 2 boats per plasma cycle. The patented plasma chamber design provides exceptional uniformity and process repeatability. Its three axis symmetrical chamber ensures all areas of the product are treated uniformly, while tight control over all process parameters ensures highly repeatable results.
HIGH-THROUGHPUT PROCESSING
The FlexTRAK-BH system’s integrated boat handling system
provides rapid material transfer for a wide range of boat sizes,
up to 2 boats per plasma cycle. Processing can be done with
most types of boats, trays and flat carriers. The patented
chamber design and control architecture enable short plasma
cycle times with very low overhead, ensuring that throughput
is maximized and cost of ownership is minimized.
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FlexTRAK-BH™ Data Sheet
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
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The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>