Products > Semiconductor > AP-1000 Plasma Treatment System
AP-1000 Plasma Treatment System
The March AP-1000 is designed to meet the rigorous demands of 24-hour operation in high-performance manufacturing environments. The system delivers quality plasma treatment along with unmatched reliability, safety and ease of operation and maintenance.
All the components of the system, including the plasma process chamber, the control electronics, the 13.56 MHz power supply with automatic impedance matching network, and the pumping system are housed within an enclosure constructed of rugged powder coated aluminum.
Optional AP-1000 HTP for enhanced productivity The AP-1000 plasma system with HTP (high throughput) shelves combines the reliability and process quality of the AP- 1000 system with the proven benefits of March’s proprietary shelf design.
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Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>
AP-1000 Data Sheet