Concord, CA - The AP-1000 system with HTP (high-throughput) shelves combines the reliability and process quality of the standard AP-1000 system with the proven benefits of March's proprietary shelf design. The AP-1000 HTP system optimizes use of the reactive ions found in RF plasma, increasing treatment uniformity while decreasing process time.

With the new HTP design, all vertical electrodes are grounded. The magazines that hold the substrates form part of the powered shelf, creating a uniform plasma glow discharge on both sides of the magazine and enhancing DC bias on the powered shelf. The improved DC bias increases ion energy and optimizes plasma-cleaning effectiveness. The AP 1000 HTP system provides higher DC bias at low system pressure, ideal for plasma treatment in magazines.

The AP-1000 HTP system allows selection from a range of process gases such as argon, hydrogen, and helium. It comes standard-equipped with four mass flow controllers for optimal gas control. Up to 12 slotted magazines can be placed vertically inside the plasma chamber; each magazine typically holds a minimum of 20 lead frames.

The AP-1000 HTP platform is completely self-contained, requiring minimal floor space. The pump, chamber, control electronics, and 13.56 MHz power supply are housed in a single enclosure. Full front access allows for convenient access to all interior components. The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability, and has multiple removable and adjustable shelves to accommodate a wide range of part carriers.

March Plasma Systems is the leader in gas plasma technology for micro- and opto-electronic packaging, PCB, and webbed material industries. Batch systems are available in several chamber sizes with multiple-shelf configurations to accommodate magazines, strips, circuit boards, wafer and process carriers. In-line systems can support multiple substrates or carriers per run, and are SMEMA-compatible.