March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System
Concord , CA, April, 2007 – March Plasma Systems, a subsidiary of Nordson Corporation (NASDAQ: NDSN) announced today it has received a firm purchase order for a FlexTRAK-WR wafer processing system from a major semiconductor manufacturing company.
The system is scheduled to be delivered the first half of 2007, where it will be installed for the purpose of high-volume semiconductor device manufacturing on 200 mm wafers.
“The FlexTRAK-WR system continues to gain acceptance by major semiconductor customers for photoresist descum, wafer cleaning, etching and other wafer applications,” said James Getty, Director of Applications at March Plasma Systems.
“The FlexTRAK-WR system provides advanced processing capabilities at an attractive price point with a low cost of ownership,” Mr. Getty continued. “Because it demonstrates excellent on-wafer performance combined with high throughput, it is an appealing choice for high-volume semiconductor device manufacturers.”
The FlexTRAK-WR “200” system is for processing wafers up to 200 mm in diameter in open cassettes or SMIF pods. The FlexTRAK-WR “300” system is for wafers up to 300 mm in diameter in FOUP pods. The FlexTRAK-WR system is designed for plasma applications such as photoresist descum, ashing, etching, surface cleaning and contamination removal. The system has a proprietary plasma chamber design and fully integrated wafer handler that provides exceptional on-wafer performance, error-free wafer handling and best-in-class throughput.
About March Plasma Systems:
March Plasma Systems is the global leader in plasma processing technology for
the device / life science, semiconductor and printed circuit board industries.
March has customer support centers worldwide, including California, Florida,
Europe, and throughout Asia. With over 20 years of continuous innovation, March
designs and manufactures a complete line of award-winning and patented plasma
processing systems.
March Plasma Systems, Inc. is a wholly owned subsidiary of Nordson Corporation, (Nasdaq: NDSN) the world's leading producer of precision dispensing equipment.
For further information contact:
March Plasma Systems (International Headquarters)
Scott Szymanski
March Plasma Systems, Inc.
2470-A Bates Avenue
Concord, CA 94520-1122
TEL: 925.827.1240
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media. More>>>
Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>