Concord,
CA
- The FlexTRAK
system is a highly configurable, high-throughput plasma
treatment system. It supports several handling configurations
to accommodate a wide assortment of variable-size form
factors. Configurations include magazine-to-magazine processing
for single and multiple strips or lead frames, reel-to-reel,
wafer processing, and standalone configuration for island-based
production environments.
The FlexTRAK
system is capable of direct, downstream and ion-free (patent
pending) plasma processing for treating a wide range of
semiconductor devices. Its universal architecture accommodates
a variety of products from individual strips to magazine
carriers for flip chips or chip scale packages. The FlexTRAK
can be integrated with a wafer-handling robot for treating
wafers up to 300 mm in size, or configured with other
magazine/strip handling equipment.
With throughput capability of up to 800 strips/hour, the
FlexTRAK
system's small three-axis symmetrical chamber and proprietary
process control provide unmatched treatment uniformity
and short-cycle times.
March's proprietary software offers an intuitive graphical
interface for easy touch-screen programming. The
FlexTRAK platform is both Internet- and LAN-ready,
and real-time process representation allows statistical
data gathering. The system easily integrates with most
process equipment, including wire bond, die attach, dispense,
mold and marking equipment. It is SMEMA compatible and
SECS-GEM II compliant.
March Plasma Systems is the leader in gas plasma technology
for the semiconductor packaging, PCB, medical and webbed
material industries, and has support centers in CA, FL,
Singapore, Europe and Japan. With over 20 years of continuous
innovation, March designs and manufactures a complete
line of award winning and patented plasma systems that
support all markets. An expert staff of scientists and
engineers is available to assist in the design of plasma
processes that improve product reliability and increase
production yields.