March Plasma News Plasma Applications Plasma PowerPlus Customer Support
Search
 
Plasma Science 101Plasma Applications LabServiceContact UsSite Map
 News > Press / Flexible Handling Capability / July 2004    
 

FlexTRAK™ Plasma Treatment System with Flexible Handling Capability

 

Concord, CA - The FlexTRAK™ system is a highly configurable, high-throughput plasma treatment system. It supports several handling configurations to accommodate a wide assortment of variable-size form factors. Configurations include magazine-to-magazine processing for single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone configuration for island-based production environments.

The FlexTRAK™ system is capable of direct, downstream and ion-free (patent pending) plasma processing for treating a wide range of semiconductor devices. Its universal architecture accommodates a variety of products from individual strips to magazine carriers for flip chips or chip scale packages. The FlexTRAK™ can be integrated with a wafer-handling robot for treating wafers up to 300 mm in size, or configured with other magazine/strip handling equipment.

With throughput capability of up to 800 strips/hour, the FlexTRAK™ system's small three-axis symmetrical chamber and proprietary process control provide unmatched treatment uniformity and short-cycle times.

March's proprietary software offers an intuitive graphical interface for easy touch-screen programming. The FlexTRAK™ platform is both Internet- and LAN-ready, and real-time process representation allows statistical data gathering. The system easily integrates with most process equipment, including wire bond, die attach, dispense, mold and marking equipment. It is SMEMA compatible and SECS-GEM II compliant.

March Plasma Systems is the leader in gas plasma technology for the semiconductor packaging, PCB, medical and webbed material industries, and has support centers in CA, FL, Singapore, Europe and Japan. With over 20 years of continuous innovation, March designs and manufactures a complete line of award winning and patented plasma systems that support all markets. An expert staff of scientists and engineers is available to assist in the design of plasma processes that improve product reliability and increase production yields.




###

For further information contact:


March Plasma Systems (International Headquarters)

Vicki Worth
March Plasma Systems, Inc.
2470-A Bates Avenue
Concord, CA USA 94520-1122

TEL: 760 930 3324

E-mail: info@marchplasma.com
Web: http://www.marchplasma.com


 



Home
| News | Applications | Lab | Plasma 1 | Service | Contact | Site Map

 

 

©2007 March Plasma Systems / A Nordson Company 800-326-1151