Concord, CA - March Plasma Systems introduces the FlexTRAK™, the latest addition to their TRAK™ series of automated plasma systems. It is capable of both direct and downstream ion-free plasma processing for treating an even broader range of semiconductor devices. It is the only commercially available, high-throughput plasma system with flexible gas dynamics.

The FlexTRAK system is ideal for high-speed, in-line manufacturing operations and for standalone configurations, where one plasma station supports an island or group of equipment. The system's flexible architecture accommodates a variety of products from individual strips to magazine carriers for flip chips or chip scale packages. The FlexTRAK platform can be integrated with a wafer handling robot for treating wafers up to 300 mm in size, or configured with other magazine/strip handling equipment.

With throughput capability of 480 substrates/hour, the FlexTRAK system's small three-axis symmetrical chamber and proprietary process control provide unmatched treatment uniformity and short-cycle times. Multiple plasma modes allow unrestricted choice of any process gas.

March's proprietary software offers an intuitive graphical interface for easy touch-screen programming. The FlexTRAK platform is both Internet- and Lan-ready, and real-time process representation allows statistical data gathering. The system easily integrates with most process equipment, including wirebond, die attach, dispense, mold and marking equipment. It is SMEMA compatible and SECS-GEM II compliant.

March Plasma Systems is the leader in gas plasma technology for micro- and opto-electronic packaging, PCB, and webbed material industries. Batch systems are available in several chamber sizes with multiple-shelf configurations to accommodate magazines, strips, circuit boards, wafer and process carriers. In-line systems can support multiple substrates or carriers per run.