Concord,
CA
- March Plasma Systems won the 2004 Advanced Packaging
Award in the category of Surface Treatment Equipment &
Materials for their FlexTRAK plasma treatment system.
Awards were presented at the Semicon West tradeshow held
in San Jose, California last month.
The FlexTRAK is a highly configurable, high-throughput
plasma system. Its universal architecture accommodates
a multitude of material handling configurations to support
a wide assortment of variable-size form factors. Configurations
include magazine-to-magazine processing for single and
multiple strips or lead frames, reel-to-reel, wafer processing,
and standalone configuration for island-based production
environments. Its small three-axis symmetrical chamber
and proprietary process control provides unmatched treatment
uniformity and short cycle times.
March Plasma Systems is the leader in gas plasma technology
with over 20 years of continuous innovation.